Linear and nonlinear capacitive coupling of electro-opto-mechanical photonic crystal cavities

Strong opto-electro-mechanical coupling in a silicon photonic crystal cavity.

We fabricate and characterize a microscale silicon opto-electromechanical system whose mechanical motion is coupled capacitively to an electrical circuit and optically via radiation pressure to a photonic crystal cavity. To achieve large electromechanical interaction strength, we implement an inverse shadow mask fabrication scheme which obtains capacitor gaps as small as 30 nm while maintaining...

Non-linear mixing in coupled photonic crystal nanobeam cavities due to cross-coupling opto-mechanical mechanisms

Mechanical tuning of two-dimensional photonic crystal cavity by micro Electro mechanical flexures

A nano-displacement sensing method for micro-opto-electro-mechanical-systems (MOEMS) is proposed. The method is based on a square attice photonic crystal (PC) made of dielectric silicon posts, mounted on a micro mechanical flexure. The flexure is fixed at one end and is free to ove at the other, to enable elastic deformations that, by being transferred to the photonic crystal array, modify its ...

Simulation and Modeling of a High Sensitivity Micro-electro-mechanical Systems Capacitive Pressure Sensor with Small Size and Clamped Square Diaphragm

This paper proposes a Micro-electro-mechanical (MEMS) capacitive pressure sensor that relies on the movable electrode displaced like a flat plate equal to the maximum center deflection of diaphragm. The diaphragm, movable electrode and mechanical coupling are made of polysilicon, gold and Si3N4, respectively. The fixed electrode is gold and the substrate is Pyrex glass. This proposed method inc...

Opto-acoustical filter based on phoxonic crystal ring resonator

In this paper, a phoxonic crystal structure is designed that shows a complete phononic and photonic ban gap and is capable to guide the optical waves with transverse magnetic polarization and acoustic waves. The materials used in the structure are nylon and molybdenum, which have suitable refractive index and elastic constant. Also, it is worth of noting that the filling factor is 28% for the p...